Identifying Variation When a process is stable and in control, it displays common cause variation, variation that is inherent ...

During 7nm gate poly removal process, polysilicon is removed exposing both NFET and PFET fins in preparation for high-k gate oxide. If the polysilicon etch is too aggressive or the source and drain ...

Optimizing CD variation and defect reduction comprehensively, to improve results of a wide defect process window with a narrow CD distribution. This study focused on the defect behavior analysis with ...

Customer satisfaction determines customer loyalty, customer purchase intentions and in turn, a company's revenue stream. Product quality improves customer satisfaction. Reducing variation in both key ...