Since the publication of the second edition of this book, many important advances have taken place in the field of optical testing. On one hand, the requirements for faster and more precise tests are ...

Shrinking technology nodes and smaller process margins require improved photolithography overlay control. Generally, overlay measurement results are modeled with Cartesian polynomial functions for ...

We were unable to process your request. Please try again later. If you continue to have this issue please contact customerservice@slackinc.com. What is the difference between the Zernike and Fourier ...

Microlenses fabricated using flexible elastomers can be tuned in focal length by application of controlled strain. By varying the strain azimuthally, the lenses may be deformed asymmetrically such ...